Pick-and-place nanomanipulation using microfabricated grippers.

Microfabricated grippers could be useful for the manipulation of nanoscopic and microscopic samples. A survey is presented of the force requirements for a microgripper to complete pick-and-place nanomanipulation tasks. We then demonstrate in situ pick-and-place operations of nanowires inside a scanning electron microscope using microfabricated electrostatically actuated grippers, and compare the theoretically estimated force requirements with the results of experimental tests of picking up nanowires to evaluate how grippers and strategies for nanomanipulation can be optimized.